SERVOTOP
Hollow Cross Precision Motion Platform
Hollow Cross Precision Motion Platform

 

Hollow Cross Precision Motion Platform

SEM Equipment Sdn. Bhd. flag
分类: SERVOTOP 当前有货
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Model :
 

 

Dimension :
 



 




 

Specifications :
 
Parameter Y axis (lower axis) X axis (upper axis)
Load(Kg) / ≤10
Stroke(mm) Customized according to requirements (<150mm) Customized according to requirements (<150mm)
Maximum Speed(mm/s) <0.5m/s <0.5m/s
Maximum acceleration <0.5G <0.5G
Positioning accuracy (µm (after compensation)) <±2 <±2
Repeat positioning accuracy (μm) <±1 <±1
Straightness(µm) <±2/100mm <±2/100mm
Orthogonality(µm) <±3/100mm <±3/100mm
Material Aluminum alloy/marble Aluminum alloy/marble
Grating resolution (µm) 0.1/0.5/1 optional 0.1/0.5/1 optional
 
Parameter Y axis (lower axis) X axis (upper axis)
Load(Kg) / ≤5
Stroke(mm) Customized according to requirements (<160mm) Customized according to requirements (<150mm)
Maximum Speed(mm/s) <0.5m/s <0.5m/s
Maximum acceleration <0.5G <0.5G
Positioning accuracy (µm (after compensation)) <±2 <±2
Repeatability (µm) <±1 <±1
Straightness(µm) <±2/100mm <±2/100mm
Orthogonality(µm) <±3/100mm <±3/100mm
Material Aluminum alloy/marble Aluminum alloy/marble
Grating resolution (µm) 0.1/0.5/1 optional 0.1/0.5/1 optional
 

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