The MEMS TVOC gas sensor is composed of a Si-based micro-hot plate of the MEMS process and a metal oxide semiconductor material with low conductivity in clean air. When the detected gas exists in the ambient air, the conductivity of the sensor changes. The higher the concentration of this gas, the higher the conductivity of the sensor. The change in conductivity can be converted into an output signal corresponding to the gas concentration using a simple circuit.
1.Detection range
Default: 1ppm～500ppm
2.High sensitivity to low-concentration polluting gases
3.Simple driving circuit, good stability
4.Long service life
The lifetime is up to 1 year (in the air)
| Specification | Parameter | |
| Sensor Type | MEMS VOC gas sensor | |
| Standard package | Ceramic package | |
| Detected Gas | Ethanol, formaldehyde, toluene, etc. | |
| Detection Range | 1ppm～500ppm | |
| Standard Circuit Conditions | Vc | ≤24V DC |
| VH | 2.5V±0.1V AC or DC | |
| RL | Adjustable | |
| Gas sensor characteristics under standard test conditions | RH | 80Ω±20Ω |
| PH | ≤50mW | |
| Rs | 1KΩ～30KΩ(in 50ppm ethanol) | |
| S | R0(in air)/Rs(in 50ppm ethanol)≥3.0 | |
| α | ≤0.9(R200ppm/R50ppm ethanol) | |
| Standard Test Conditions | temperature humidity | 20℃±2℃；55%RH±5%RH |
| Standard Test Circuit | VH:2.5V±0.1V； Vc:5.0V±0.1V | |
