CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
Light-weight and compact. A large number have already been shipped. Our standard cryopump.
For experimental systems and small-size equipments.
Multiple operation (up to 3 units)
Ultra-high vacuum (10-8 Pa or lower)
