CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
Suitable for sputtering process.
The displacement of argon is about 2.5 times that of the conventional model (U8H).
The hydrogen exhaust rate has improved to about 1.2 times that of the conventional model (U8H).
The interval to playback becomes longer, contributing to the improvement of equipment availability.
Multiple operation (up to 3 units)
