Model :
| Parameter | X-axis | Y axis | Z axis | Parameter | 0 axis | ||
| Continuous thrust(N) | 12 | 15 | Continuous torque(Nm) | 0.8 | |||
| Peak thrust(N) | 25 | 45 | Peak torque(Nm) | 4 | |||
| Continuous Current(Arms) | 2.5 | 4.8 | Continuous Current(Arms) | 2 | |||
| Peak current (Arms) | 11.5 | 13.4 | Peak current (Arms) | 10 | |||
| Positioning time (ms) | <100 | <100 | Rated speed (rpm) | 100 | |||
| Allowable load (Kg) | <3 | <3+X | <5+X | Maximum speed (rpm) | 200 | ||
| Resolution(um) | 0.1、0.5、1 | Repeat positioning accuracy (°) | ±0.005 | ||||
| Repeat accuracy(um) | ±1 | Absolute positioning accuracy (°) | |||||
| Straightness(um) | ±1.5 | Angle range(°) | 360° unlimited | ||||
| Flatness(um) | ±2 | Diameter(mm) | 97 | ||||
| Stroke(mm) | 15 | 8 | Rotor moment of inertia (KG.m²) | 0.00113 | |||
| Dimensions L*W*H(mm) (excluding sensor) | 80 × 80 | 80 × 80 | Weight(kg) | 1.2 | |||
| Weight(Kg) | 1.8 | 1 | 1.3 | ||||
| Platform flatness(um) | ±5 | ||||||
| Platform size L×W×H (mm) (excluding sensor) | 80×80×136.1 | ||||||
| Platform weight (kg) | 5.3 | ||||||
| Parameter | X-axis | Y axis | Parameter | 0 axis | |
| Continuous thrust(N) | 12 | Continuous torque(Nm) | 0.8 | ||
| Peak thrust(N) | 25 | Peak torque(Nm) | 4 | ||
| Continuous Current(Arms) | 2.5 | Continuous Current(Arms) | 2 | ||
| Peak current (Arms) | 11.5 | Peak current (Arms) | 10 | ||
| Positioning time (ms) | <100 | Rated speed (rpm) | 100 | ||
| Allowable load (Kg) | <3 | <3+X | Maximum speed (rpm) | 200 | |
| Resolution(um) | 0.1、0.5、1 | Repeat positioning accuracy (°) | ±0.005 | ||
| Repeat accuracy(um) | ±1 | Absolute positioning accuracy (°) | |||
| Straightness(um) | ±1.5 | Angle range(°) | 360° unlimited | ||
| Flatness(um) | ±2 | Diameter(mm) | 97 | ||
| Stroke(mm) | 15 | Rotor moment of inertia (KG.m²) | 0.00113 | ||
| Weight(Kg) | 1.8 | 1 | Weight(kg) | 1.2 | |
| Platform flatness(um) | ±5 | ||||
| Platform size L×W×H (mm) (excluding sensor) | 80×80×75.5 | ||||
| Platform weight (kg) | 4 | ||||
