Dimension :
| Parameter | X-axis (beam axis) | Y axis (dual drive axis) | Z axis (vertical axis) |
| Load(Kg) | / | / | On demand |
| Stroke(mm) | Customized according to requirements (<2m) | Customized according to requirements (<4m) | Customized according to requirements (<0.3m) |
| Maximum speed (mm/s) | <1.5m/s | <1.5m/s | <0.3m/s |
| Maximum acceleration | <1.5G | <1.5G | <0.5G |
| Positioning accuracy (µm (after compensation)) | <±2 | <±2 | <±5 |
| Repeatability (µm) | <±1.5 | <±1.5 | <±3 |
| Straightness(µm) | <±4/300mm | >±4/300mm | >±5 |
| Orthogonality(µm) | <±5/300mm@Y | <±5/300mm@X | <±3/300mm |
| Material | Aluminum alloy/marble | Aluminum alloy/marble | Aluminum alloy |
| Grating resolution (µm) | 0.1/0.5/1 optional | 0.1/0.5/1 optional | 0.1/0.5/1 optional |
