Dimension :
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| Parameter | Y axis (lower axis) | X axis (upper axis) | Z axis | DD1 axis | DD2 axis |
| Load(Kg) | On demand | / | on demand | on demand | 3-10kg(customized on demand) |
| Stroke(mm) | Customized according to requirements (<1.5m) | Customized according to requirements (<1.5m) | Customized according to requirements (<20mm) | ±90° | 360° |
| Maximum Speed(mm/s) | <1.5m/s | <1.5m/s | <0.15m/s | Customized according to needs | Customized according to needs |
| Maximum acceleration | <2G | <2G | <1G | Customized according to needs | Customized according to needs |
| Positioning accuracy (µm (after compensation)) | <±2 | <±2 | <±2 | ±25arcsec | ±25arcsec |
| Repeat positioning accuracy (μm) | <±1 | <±1 | <±1 | ±3arcsec | ±3arcsec |
| Straightness(µm) | <±2/300mm | <±2/300mm | <±2/50mm | / | / |
| Orthogonality(µm) | <±3/300mm@Y | <±3/300mm@X | <±4/300mm | / | / |
| Material | Aluminum alloy/marble | Aluminum alloy/marble | Aluminum alloy | Steel (main body) | Steel (main body) |
| Grating resolution (µm) | 0.1/0.5/1 optional | 0.1/0.5/1 optional | / | Customized according to needs | Customized according to needs |
