Dimension :
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| Parameter | X axis (upper axis) | Y axis (lower axis) |
| Load(Kg) | On demand | / |
| Stroke(mm) | Customized according to needs | Customized according to needs |
| Maximum Speed(mm/s) | <1.5m/s | <1.5m/s |
| Maximum acceleration | <1G | <1G |
| Positioning accuracy (µm (after compensation)) | <±1.5 | <±1.5 |
| Repeat positioning accuracy (μm) | <±1 | <±1 |
| Straightness(µm) | <±2/300mm | <±2/300mm |
| Orthogonality(µm) | <±3/300mm@Y | <±3/300mm@X |
| Material | Marble | Marble |
| Grating resolution (µm) | 0.1/0.5/1 optional | 0.1/0.5/1 optional |
