| X-axis Travel (mm) | 150 | 200 | 250 | 300 | 400 | |
| Y-axis Travel (mm) | 100 | 100 | 150 | 200 | 300 | |
| Metal table size (mm) | 354×228 | 404×228 | 450×280 | 500×330 | 450×350 | |
| Glass table size (mm) | 210×160 | 260×160 | 306×196 | 350×250 | 606×466 | |
| Resolution (μm) | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | |
| Indication error (mm) | E1XY=(2.5+L/100) | |||||
| Z-axis Travel (mm) | 100 (focusing) | 100 (focusing) | 100 (focusing) | 100 (focusing) | 100 (focusing) | |
| Dimension (mm) | 780×780×1100 | 810×780×1120 | 810×780×1120 | 900×780×1020 | 1040×780×1120 | |
| Projection screen | Size (mm) | Ф 312 | ||||
| Rotary range | 0~360° | |||||
| Resolution | 1' or 0.01° | |||||
| Lens | Magnification | 10× (Optional) | 20× (Optional) | 50× (Optional) | 100× (Optional) | |
| Field of view (mm) | Ф30 | Ф15 | Ф6 | Ф3 | ||
| Working distance (mm) | 77.7 | 44.3 | 38.4 | 25.3 | ||
| Max. measuring Height (mm) | 90 | 90 | 90 | 90 | ||
