Product Overview

The SE-2000 is a modular spectroscopic ellipsometer platform that provides the widest spectral range in a single tool, covering wavelengths from 190 nm up to 25 µm.

Designed to meet the most demanding requirements in both R&D and high-volume manufacturing, the SE-2000 platform delivers high-speed, non-destructive optical characterization. By combining multiple spectral extensions and advanced measurement modes, it determines layer thickness, complex refractive indices, and absorption coefficients for a vast array of materials. From semiconductor stacks to complex polymer films, the SE-2000 offers a flexible architecture that grows with your research needs.

Key Specifications

System Parameters
Spectral Range 190 nm to 25 µm (UV to Mid-IR)
Electronics Semilab Smart Interchangeable
Software SAM/SEA Next-Gen Generation
Goniometer High-Precision Automated
Mapping Fully Automated Stage Options
Metrology Expandable Multi-Sensor Integration

Core System Features

 
Widest Spectral Coverage

Uniquely spans from Deep-UV through Visible to Mid-Infrared, allowing for characterization of materials across all optical regimes.

 
Smart Electronics

Features Semilab’s modular electronics platform with interchangeable components, facilitating rapid maintenance and hardware scalability.

 
Automation Ready

Equipped with fully automated goniometers and mapping stages to ensure high throughput and repeatability for industrial applications.

 
Multi-Sensor Integration

Designed to host additional metrology sensors such as 4-point probe or Eddy Current, creating a centralized characterization hub.

 
Advanced Analysis

Supports Mueller Matrix (up to 16 elements), Generalized Ellipsometry, and scatterometry for complex 3D structures.

 
Non-Destructive

Utilizes pure optical interaction to measure samples without contact, preserving the integrity of sensitive substrates.

Technical Specifications

Technical Parameter Specification Detail
Standard Spectral Coverage 190 nm – 2500 nm (Extensions up to 25 µm)
Core Technology Spectroscopic Ellipsometry with Rotating Compensator
Advanced Modes Mueller Matrix (11 or 16 elements), Generalized Ellipsometry
Goniometer Fully Automated Angle of Incidence adjustment
Stage Mapping Automated X-Y mapping for large area uniformity checks
Electronics Platform New generation Smart Electronics (Interchangeable)
Operating Suite SAM/SEA software for measurement and sophisticated analysis
Sensor Capability Expandable to 4pp, Eddy Current, and Reflectometry
Physical Parameters Thickness, n and k constants, Porosity, Bandgap
Metrology Type Scatterometry for 3D Periodic Structures

Scientific & Industrial Applications

Semiconductor Manufacturing

Precise metrology for high-k dielectrics, photoresists, and complex transistor gate stacks in logic and memory nodes.

Display Technology

Characterization of multi-layer OLED stacks, TCO layers, and color filter materials for high-resolution panels.

Photovoltaics & Solar

Monitoring anti-reflective coatings and passivation layers to maximize efficiency in next-gen solar cells.

System Advantages & Performance Highlights

Extreme Spectral Versatility
By covering the range from Deep-UV to Mid-IR, the SE-2000 allows for the characterization of vibrational modes and electronic transitions within the same platform, providing a more complete physical model of the material.
Future-Proof Modular Design
The "Smart Electronics" approach ensures that hardware can be swapped or upgraded without replacing the entire system. This protects your investment as measurement requirements evolve from R&D into production.
Integrated Multi-Metrology
The SE-2000 isn't just an ellipsometer; it's a characterization hub. Integrating electrical measurements (4pp, Eddy Current) alongside optical ones allows for simultaneous correlation of physical properties.
Advanced Analytical Power
Equipped with scatterometry capabilities and full 16-element Mueller Matrix support, the system provides 3D structural information for patterned wafers, making it essential for sub-10nm technology nodes.