| Model |
MTM-MX-12R |
| Application |
300mm Wafer Inspection Microscope |
| Optical System |
Color-corrected infinity optical system |
| Head Type |
Binocular (0°–35° tilt) / Trinocular available |
| Eyepiece |
10X / 25mm high eye-point, adjustable diopter |
| Focus System |
Coaxial coarse & fine focus, 35mm coarse travel, 0.001mm fine precision |
| Objective System |
Motorized 6-position changer |
| Objective Magnification |
5X, 10X, 20X, 50X, 100X |
| Inspection Modes |
Brightfield, Darkfield, DIC, Polarization |
| Filter System |
Neutral, Red, Green, Blue filters |
| Illumination |
12V 100W reflected light source |
| Stage Travel |
305 mm × 356 mm, 3-layer working stage with clutch control |
| Structure |
Anti-vibration design with 6 support base system |