ATF 6

The ATF 6 Sensor is an automated tracking focus solution designed for precision microscopy applications that allows focusing servo systems to quickly and accurately determine the distance and direction to the best focus position. Leveraging advanced laser triangulation technology, it ensures rapid and accurate focus for both stationary and moving samples. ATF6 sensor integrates seamlessly with infinity-corrected microscope systems, delivering unparalleled focus reliability even on challenging surfaces like patterned samples.

 

Features

• Wide Capture Range: Achieves optimal performance with capture ranges up to ±3000 µm, ensuring flexibility across diverse microscopy setups.
• Includes advanced features SWIFT, and supporting piezo Z-actuator (PZ) and WDI Z stages for enhanced functionality.
• Available in 660 nm, 785nm, or 850nm.

Applications

• The ATF6 sensor is the ideal solution for semiconductor, flat panel display, biomedical, and optical metrology microscopy imaging.