Opti™ RF Power Rack:
Rack Size, with casters and lift hooks (H x W x D): 43.67 in (1109 mm) x 22.56 in (573 mm) x 36.88 in (935.75 mm)
RF Generators: Two Paramount Plus generators (2 MHz, 5 kW) and one Paramount generator (13.56 MHz, 5 kW)
Line Voltage: 200/208 VAC +/-10% (47 to 63 Hz)
AC to RF Efficiency: Above 70% efficient at full power
EMO: Attached to rack with guard
Smoke Sensor: Smoke/dust detector fed by a small fan. Tied to EMO.
Leak Detector: Sensor on bottom water catch tray. Tied to EMO.
PowerInsight HMI: 10.1 in adjustable touchscreen tablet
Advanced Features: Data recording, exporting, and reporting and HMI remote access
详情
Efficiency Meets Insight The Opti RF power rack is a modernized solution for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools. It is designed to enable high efficiency, providing the intelligence needed to monitor health and optimize processes.
Customized solutions for other 200 mm tools are available upon request
.Key Features
High-performance AE generators with > 70% efficiency at full power
Real-time HMI dashboard and PowerInsight
Built-in safety including EMO switch, leak detection, smoke detection, and overcurrent protection
Optional remote access within secure fab networks
Benefits
Higher process stability and efficiency from advanced RF power delivery
View live system data and historical data (up to one hour), temperature charts, and time-stamped fault and warning history from each generator
Significant ROI in operating cost and tool downtime
Versatile design for easy accessibility and serviceability
