Ascent AMS Pulsed and DC Power System:
Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 0.5 to 5 kHz
Input Voltage (V): 400, 440, 480 VAC
Power Level (kW): 30 to 60 kW
Rack Width: Full rack
Height (Inches): 6U
Output Voltage Range (V): 400-1000 V
Communications Interface: Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
Advanced Features: Progressive arc management
Process Applications: Deposition
Ignition Voltage (V): 1200
详情
Stable Power Delivery for Extreme Arc Conditions and Highly Repeatable Films As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. The AMS provides advanced arc management, allowing maximum power delivery with faster recovery to process. Extreme fast recovery also means extremely low energy delivered through arcs, preventing substrate damage. For high power applications, the Ascent AMS can be used in primary/secondary configuration. Common applications include output configurations over 100 kW. However, the combined water/air cooling design keeps the generator footprint to a minimum
.Key Features
Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync® technology — primary/secondary up to 12 units
Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, Ethernet/IP, and analog communications
Benefits
Obtain high film quality and throughput
Reduce film, substrate, and equipment damage
Achieve stable throughput and power delivery under extreme arcing conditions
