Pinnacle III Plus+ Pulsed DC Power Supply:
Cooling: Air
Output Frequency (MHz, kHz): 5 to 350 kHz
Input Voltage (V): 208, 400, 440, 480 VAC
Power Level (kW): 1.5 to 10 kW
Rack Width: Full rack
Height (Inches): 3U
Output Voltage Range (V): 325-800 V
Communications Interface: Ethernet, EtherCAT, DeviceNet, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
Advanced Features: Arc management
Process Applications: Deposition
Ignition Voltage (V): 800
详情
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
Charge clearing during the reverse pulse prevents arcs from developing
Adjustable process through frequency and duty cycle control
Compact air-cooled design expandable in main/satellite configurations
Features
Adjustable frequency range of 5 to 350 kHz /
Variable duty cycle up to 45% /
Wide voltage range — single-tap wide impedance range /
Superior arc management
Dual output available for multi-chamber production
