Specifications
- Navigator II:
Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 400 kHz to 60 MHz
Input Voltage (V): 110 VAC
Power Level (kW): 1 to 60 kW
Rack Width: N/A, chamber mounted
Communications Interface: EtherCAT, Ethernet, DeviceNet, RS-232
Advanced Features: Pulsing, CEX
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
Compliance: CE, Semi S2
详情
Rapid, Accurate, and Reliable Digitally-Tuned Matching
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
Key Features
- Digital architecture with enhanced tuning algorithms
- Pulsed-RF power delivery
- Sweep-frequency operation
- Intermodulation distortion (IMD) immunity for multi-frequency applications
- Real-time process power and impedance measurement
Benefits
- Speeds tuning/matching response time
- Tightens process control
- Helps increase tool throughput and product yield
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