Model ESR: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

详情

Dry vacuum pump with low power consumption, suitable for corrosive process applications

Low power consumption
Corrosion resistant material options
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available

Features and Benefits

With EBARA’s unique rotor design and idling function, the Model ESR range achieves low power consumption and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.

Specifications

Model		Unit	ESR20N	ESR30	ESR30N	ESR500W(N)
Pumping Speed		L/min	1,300 ~ 2,000	3,000	3,000	46,000
Ultimate Pressure		Pa	2.0	0.53	0.67	0.2
Connection	Inlet		NW40	NW50	NW50	ISO160
Connection	Outlet		NW40	NW40	NW40	NW40
Approx. Power at Ultimate Pressure		kW	0.7	1.7	1.7	3.1
Cooling water	Flow rate	L/min	2~8	3.5~8	3.5~8	3.5~8
Cooling water	Temperature	℃	Max. 30	Max. 30	Max. 30	Max. 30
N2	Flow rate	Pa•m3/s	19~22 (0)	19~22 (3.4)	19~22 (3.4)	19~22 (3.4)
Power Supply Phase/Volt/Freq.	200V Models		3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz
Power Supply Phase/Volt/Freq.	400V Models		3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz
Power capacity		kVA	4.0	7.0	7.0	12.3
Weight		kg	90	190	190	500