| 
							Compression ratio N2/H2 | 
						
							>108 / 2 x 103 | 
					
					
						| 
							Ultimate pressure | 
						
							10-7 Pa (10-9 Torr) | 
					
					
						| 
							Allowable backing pressure | 
						
							266 Pa (2 Torr) | 
					
					
						| 
							Max gas flow N2 *(water cooled only) | 
						
							4000 sccm | 
					
					
						| 
							  | 
						
							(6.76 Pam3s-1) | 
					
					
						| 
							Max gas flow Ar * (water cooled only) | 
						
							2100 sccm | 
					
					
						| 
							  | 
						
							(3.55 Pam3s-1) | 
					
					
						| 
							Rated speed | 
						
							27700 rpm | 
					
					
						| 
							Starting time | 
						
							<10 minutes | 
					
					
						| 
							Mounting position | 
						
							Any orientation | 
					
					
						| 
							Input voltage | 
						
							200-240 V | 
					
					
						| 
							Max input power without TMS | 
						
							1500 VA | 
					
					
						| 
							Max input power with TMS | 
						
							1800 VA | 
					
				
			
			* The maximum gas flow is applicable under conditions that N
2 or Ar gas is pumped continuously with water cooling temperature under 25º C and the backing pump (10,000 l/min size) is used. It is changed on condition