VMZ Zenith Video Measuring Machine with a sub-micron accuracy, is designed specially for high accuracy measurement scenarios like semiconductor, microassembly and optical communication.
VMZ Zenith Video Measuring Machine with a sub-micron accuracy, is designed specially for high accuracy measurement scenarios like semiconductor, microassembly and optical communication.
| Model | VMZ432-T1 | VMZ432-T2 | VMZ432-T3 | |||
|---|---|---|---|---|---|---|
| Travel(mm) | 400 x 300 x 200[1] | |||||
| External Dimensions (mm) | 800 x 1240 x 1762 | |||||
| Mass (kg) | 420 | 450 | ||||
| Max. Stage Loading (kg) | 25 | |||||
| Optics | Auto zoom lens | Microscope lens | Auto zoom lens | Microscope lens | ||
| Magnification[2] | 25-338x | 1131x /2829x | 52-680x | |||
| Measuring Range(mm) | Single lens | 380 x 300 | ||||
| Lens coincidence | – | 325 x 300 | ||||
| Accuracy[3](µm) | X/Y linear | E1=(0.7+L/300) | ||||
| XY area | E2=(0.8+L/300) | |||||
| Z linear | E1=(2.8+L/300) | E1=(2.8+L/150) | E1=(0.9+L/150) | E1=(2.8+L/150) | ||
| Illumination | Profile | LED cold light, 256 brightness adjustable | ||||
| Surface | Programmable 6 rings 8 segments LED cold light 256 brightness adjustable | LED cold light 256 brightness adjustable | – | LED cold light 256 brightness adjustable | ||
| Coaxial | LED cold light, 256 brightness adjustable | |||||
| Camera | High definition industrial color digital camera | |||||
| Drive system | 4-axis CNC servo control system | |||||
| Speed (mm/s) | XY | 100 | ||||
| Z | 50 | |||||
| Guide | Ultra high precision linear guide rail | |||||
| Scale | 0.01 µm ultra-high precision scale | |||||
| The Min Unit (µm) | 0.01 | |||||
| Image Processing | Advanced TZTEK image processing method: 256 gray level, 20:1 sub- pixel processing technology | |||||
| Software | Vispec (VMZ Version) | |||||
| Environment | Temperature20°C±2°C, Humidity 30-80% | |||||
| Vibration<0.002 g, below 15 Hz | ||||||
| Power | 200-240 vac, 50/60 Hz, 1 phase, 700 W | |||||
[1] Customizable for other travel range.
[2] Magnification is approximate and depends on the size and resolution of the monitor.
[3] L is the measured length in mm, determined by TZTEK’s inspection method.
[4] Optional objective lens 10x, 20x, 50x.
Malaysia
