Specifications
- Solvix® DC and Pulsed Power Supply:
Cooling: Air
Output Frequency (MHz, kHz): Pulsing and non-pulsing options available. Please refer to Datasheet.
Input Voltage (V): 400, 480 VAC
Power Level (kW): Multiple options available. Please refer to Datasheet.
Rack Width: Full Rack
Height (Inches): 4U, 6U
Communications Interface: Analog, Profibus, EtherCat, RS-485
Process Applications: Hard coating
Ignition Voltage (V): 1000
Description
3 to 30 kW DC and Pulsed-DC Power Supplies
Solvix DC and pulsed-DC power supplies for metallic and reactive sputtering provide precise control and proven reliability—backed by AE’s worldwide support network. Offering a wide range of power and frequency levels, pulsing, and multiple communications options, they offer a rugged and cost-effective solution for your unique process
.Key Features
• Best-in-class arc handling
• DC and pulsed-DC units
• Current, power, and voltage regulation modes
• Flexible architecture
• Air cooling
• Multiple units configurable for high-power requirements
• High peak-to-peak voltages (high-frequency models)
• Patented tapless wide output load impedance range (medium-frequency models)
Benefits
• Proven reliability, accuracy, and repeatability
• Worldwide support network
• Reduced substrate damage and process contamination
• Adaptability to a wide range of process requirements
• High throughput
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