High-resolution atomic force microscopes with extremely low noise, reliable SPM performance, and highly reproducible roughness characterization for research, quality control, and semiconductor wafer analysis up to 200 mm. The AFM tip scanner series combines ease of use with performance, bringing together decades of SPM application and manufacturing experience to help users achieve reliable results in the shortest possible time. The compact design delivers outstanding stability and scan rates, while the plug-and-play cantilever exchange supports fast and safe operation. An integrated optical axis in the SPM scanner provides total visual control during approach and positioning. The AFM tip scanner supports both common and advanced SPM modes, and integrated electronics in the scan head help guarantee very low noise values in electrical SPM measurements. This AFM series is designed for laboratories, semiconductor process development, industrial quality control, and R&D teams that require precise nanoscale surface characterization, stable scanning, and model options ranging from compact small-sample analysis to fully automated large-sample investigation. Built around AFM tip scanner technology developed for fast, reliable, and repeatable SPM results across routine and advanced nanoscale measurement tasks. Supports faster setup, simplified operation, and safe cantilever handling for users performing frequent day-to-day AFM measurements. An integrated optical axis and high-resolution CCD visual control help users monitor approach, improve sample targeting, and position scan areas accurately. The compact AFM tip scanner design is optimized for excellent mechanical stability, minimized drift, and dependable scan performance. The AFM series supports different system sizes and automation levels, from manual compact measurements to programmable large-sample automated inspection. Integrated electronics in the scan head help deliver low noise values that are especially valuable in electrical SPM measurement modes. The AFM-101 uses an AFM tip scanner with tube-type scanner architecture and is designed for laboratories that need dependable small-sample AFM measurements in an affordable and space-efficient format. Its scanner mount is optimized for stability and minimized drift, while the integrated CCD visual control allows exact sample positioning. The short mechanical loop and circular base/scanner-mount concept support high stability and low drift values in routine scanning work. This model is especially suitable for research labs, education environments, and routine inspection tasks where users want strong AFM usability and repeatable nanoscale surface characterization without moving to a larger automated system. The AFM-1000 includes an AFM tip scanner, a super rigid rail mount with manual Z sample height adjustment, and a motorized sample stage for automated measurements. Free lateral access to the sample and high-resolution digital CCD camera support make it highly practical for research and process characterization. The system’s compact granite stage design supports easy and efficient measurements, while its versatility allows users to investigate a wide range of sample types with SPM. End users may specify which scanner type, tube or planar, is integrated into the model. The AFM-2000 combines an AFM tip scanner with high-precision sample positioning, full automation capability, and an optional additional optical axis. The combination with high-end optics enables automated preselection of sample sites for SPM investigation. This model is optimized for large samples. Its long-range XY sample stage allows the investigation of a 200 mm × 250 mm area in all positions. Fully programmable sample positioning enables autonomous SPM measurements on multiple sample positions with automatic image analysis and automatic report generation. The positioning progress is fully automated and highly stable, making the AFM-2000 especially suitable for analyzing multiple structural features on a single sample during long-term and overnight measurement runs. Designed for high-resolution topography measurement, phase imaging, roughness characterization, and precise nanoscale surface investigation. Supports quality control and reproducible roughness characterization for semiconductor wafers and advanced material surfaces, with large-area capability up to 200 mm. Suitable for KPFM, EFM, SCM, and other low-noise electrical SPM tasks where stable electronics and reliable positioning are important. AFM-101 offers compact, practical AFM performance for research groups and labs that need stable day-to-day small-sample measurements. AFM-1000 expands capability with motorized stage movement and broad sample compatibility for versatile SPM applications. AFM-2000 is built for automated multi-position measurements, long-term runs, and industry-oriented process control and R&D workflows.AFM-101 / AFM-1000 / AFM-2000 Atomic Force Microscope Series
Product Overview
Series Highlights
Main Features
AFM Tip Scanner
Plug-and-Play Cantilever Exchange
Visual Control During Positioning
Outstanding Stability and Scan Rates
Modular Platform
Low-Noise Electrical SPM Capability
Supported SPM Measurement Modes
Mechanical & Magnetic Modes
Electrical & Advanced Modes
AFM-101 Compact Atomic Force Microscope
AFM-101 Key Specifications
AFM-1000 Atomic Force Microscope
AFM-1000 Key Specifications
AFM-2000 Automated Atomic Force Microscope
AFM-2000 Key Specifications
Application Focus
Nanoscale Surface Characterization
Semiconductor & Wafer Analysis
Electrical SPM Investigations
Routine Laboratory Measurements
Flexible Automated Measurements
Industrial Automated Inspection
System Specifications Comparison
Specification
AFM-101
AFM-1000
AFM-2000
Sample size
50 mm
70 mm
200 mm
Sample thickness
5 mm
60 mm
60 mm
XY movement of sample
16 × 16 mm
100 × 100 mm
200 × 250 mm
XY movement
manual
motorized
motorized with or without reference coordinate system, automated XY table control
Completely automated measurement
no
yes
yes
High resolution CCD camera
yes
yes
with bright and dark field or DIC imaging
Scanner
tube scanner
tube OR planar scanner
planar scanner
Controller
High-performance AFM controller
Software
SAM2
Malaysia