Description

Chotest Laser Interferometer Measurement System – SJ6000 Series

SJ6000 Laser interferometer measurement system with high precision up to nanoscale for high accuracy calibration by MSP Metrology (M) Sdn Bhd from Chotest China.

Features

High Precision of Measurement

Resolution is up to nanoscale based on the technology of laser interference

With high-precision environmental compensation modules, influences on measuring result which result from temperature, atmospheric pressure, relative humidity, material temperature and other environmental factors are eliminated;

Ensure long-term frequency stability of laser by using the laser thermal frequency stabilization control system;

Design of separating interferoscope from host avoids heat distortion of interferoscope, which ensures the stability of interference optical path.

Whole Parameters Measurement

Measure linearity, angle, straightness, perpendicularity and other geometrical parameters

Test the linear positioning accuracy and repeated positioning accuracy of guide rails for CNC machine tools, coordinate measuring machines and other precision motion equipments;

Test the pitch angle, swing angle, perpendicularity and straightness of the guide rails, in addition it can calibrate axis of rotation of machine tools.

Error Compensation

According to compensation settings by user, the system automatically generates error compensation table for calibration of machine tools.

Dynamic Measurement

With functions of Dynamic measurements (displacement-time curve, velocity-time curve, acceleration-time curve), amplitude measurement and frequency analysis, it can analyze vibration test of machine tool, dynamic characteristics of ball screw, response characteristics of drive system, dynamic characteristics of guide rail and so on.

Technical Data

System parameters:

Measuring method: single frequency
Laser frequency accuracy: 0.05ppm
Dynamic capture rate: 50kHz
Warm-up time: about 6 min
Operating temperature: (0-40)°C
Environment temperature: (0-40)°C, humidity: 0-95%
Storage temperature: -20°C-70°C

Environmental sensors:

Atmospheric temperature sensor: ±0.1°C (0-40)°C, resolution: 0.01°C
Material temperature sensor: ±0.1°C (0-40)°C, resolution: 0.01°C
Atmospheric humidity sensor: ±5% (0-95%)
Atmospheric pressure sensor: ±0.1kPa (65~115)kPa

Linear measurement:

Measuring range: (0-80)m
Measuring accuracy: 0.5ppm (0-40)°C
Measuring resolution: 1nm
Maximum measuring speed: 4m/s

Angle measurement:

Axial range: (0-15)m
Measuring range: ±10°
Measuring accuracy: ±(0.02%R+0.1+0.024M) ″ (R is indicating value, unit: ″; M is measured length in m)
Measuring resolution: 0.1″

Flatness measurement:

Axial range: (0-15) m
Flatness measuring range: ±1.5 mm
Measuring accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in meters)
Substrate size: 180mm adjustable, 360mm adjustable
Measuring resolution: 0.1μm

Straightness measurement:

Item	Axis range	Measuring range	Accuracy	Resolution
Short straightness	(0.1-4)m	±3.0mm	±(0.5+0.25%R+0.15M²) μm	0.01 μm
Long straightness	(1-20)m	±3.0mm	±(5.0+2.5%R+0.015M²) μm	0.1 μm
Note: R is indicating value in μm; M is measured length in meters

Perpendicularity measurement:

Item	Axis Range	Measuring Range	Accuracy	Resolution
Short perpendicularity	(0.1-3)m	±3/M mm/m	±(2.5+0.25%R+0.8M) μm/m	0.01μm/m
Long perpendicularity	(1-15)m	±3/M mm/m	±(2.5+2.5%R+0.08M) μm/m	0.1μm/m
Note: R is test result of perpendicularity; M is measured length in meters

Rotary axis measurement:

Measuring range of angle: 0-360°
Max rotation speed: 10rpm
Pitch accuracy of precision turntable: ±1″
Resolution: 0.1″

Contact us today to inquire about the Chotest SJ6000 Series and elevate your measurement capabilities.

More detail about MSP Metrology (M) Sdn Bhd