・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
SMC Automation (Malaysia) Sdn BhdPneumatic Equipment Supplier Malaysia, Selangor, Control Valve Supply KL, Penang, Vacuum Pad Supplies JB, Perak, Melaka ~ SMC Automation (Malaysia) Sdn Bhd