| Item Code | 00 |
|---|---|
| Model | PDC610 |
| Plasma Mode | RIE and DP mode changeable by touch panel |
| Electrode Structure | 3-stage independent parallel flat stage |
| RF Power | MAX. 600W |
| Oscillation Frequency | 13.56MHz Quartz Oscillator |
| Chamber Dimensions | W350 × D270 × H300mm |
| Stage Size | W250 × D220mm x 3 stages |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems（Ar, O2） |
| Purge Gas | N2 or Dry air |
| Vacuum Pump | Not included |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| Output Setting | Manual setting on LED touch panel |
| Internal dimensions（W×D×H mm） | 350×270×300mm |
| External dimensions（W×D×H mm） | 600×722×700mm |
| Remarks(dimensions) | 00 |
| Power Source |
AC200 to 415V Three phase with step-down transformer |
| Weight | 180kg |
Malaysia
