Plasma Cleaner (Parallel Electrode) (V1000XS): Top Choice in Selangor, Malaysia, Kuala Lumpur (KL), Puchong Renetech Sdn Bhd

Description

Big capacity model suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.

Features of Plasma Cleaner (Parallel Electrode) (V1000XS)

The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
High-precision matching unit and highly reliable RF generator

Specifications

Item Code	328214
Model	V1000XS
Plasma Mode	DP/RIE
Oscillation Frequency	13.56MHz
RF Power	1,000 & 1,500W
Stage Dimensions	400W × 375D mm, Parallel flat double stage
Reaction Gas	Mass flow control, 2 system + 1 for purge gas
Vacuum Pump	Included, Approx. 1,000L/min exhaust volume
Safety Device	Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions（W×D×H mm）	600×554×440mm
External dimensions（W×D×H mm）	900×1000×2040mm
Remarks(dimensions)	Stage dimensions: 400W x 375D mm
Power Source	3P 200V to 415V A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200)
Weight	00kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)

External dimensions do not include protrusions.

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