| Item Code | 215008 |
|---|---|
| Model | PR301 |
| System | DP mode, Barrel type |
| High Frequency Output | Max. 300W |
| Oscillation Frequency | 13.56MHz |
| Tuning Method | Manual biaxial |
| Reaction Chamber | Pyrex Glass φ118 × L160mm x 1 chamber |
| Reaction Gas System | 1 system (oxygen), flow meter |
| Control System | Auto pressure regulation and Auto leakage bulb |
| Piping Material | SUS, Teflon, copper and brass |
| External Dimensions | W438 × D520 × H556mm (without projection） |
| Internal dimensions（φ×D mm） | φ118×160mm |
| External dimensions（W×D×H mm） | 438×520×660mm |
| Remarks(dimensions) | 118φ x 160Dmm x 1 chamber |
| Power Source |
AC115V/220VV Single phase |
| Weight | 34kg |
Malaysia
