SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.
The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.
Measurement and analysis for various products, components and materials’ surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap, hole, stage, curvature, deformation, etc
Integration software: measurement and analysis are operated in the same interface; With pre-configured analysis parameters, the software automatically statistics measurement data, and achieves rapid CNC measurement.
It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.
Measurement and analysis for various products, components and materials’ surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap, hole, stage, curvature, deformation, etc
Integration software: measurement and analysis are operated in the same interface; With pre-configured analysis parameters, the software automatically statistics measurement data, and achieves rapid CNC measurement.
| Model | SuperView W1 | ||
|---|---|---|---|
| Light source | Green LED | ||
| Video System | 1024 x 1024 | ||
| Optical Lens | 10X, 50X, (Optional 2.5X, 5X, 20X, 100X) | ||
| Optical Zoom | 1X (Optional 0.5X, 0.75X) | ||
| Lens Holder | 3 holes-manual | ||
| XY Object Table | Size | 200 x 200mm | |
| Moving Range | 100 x 100mm(Customization is supported) | ||
| Loading Capacity | 10kg | ||
| Control Method | Motorized | ||
| Tilt | ±4° Manual | ||
| Z-Axis Focusing | Moving Range | 100mm | |
| Control Method | Motorized | ||
| Scanning range of Z-Axis | 2.2mm (bigger range is optional) | ||
| Resolution of Z-Axis | 0.1nm | ||
| Max Scanning Speed | 30µm/s | ||
| Stage Measurement | Uncertainty | Repeatability | |
| 0.3% | 0.08% 1σ | ||
| Size | L590 x W600 x H790mm | ||
| Weight | <120kg | ||
Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
| Zoom Ratio of Lens | 2.5X | 5X | 10X | 20X | 50X | 100X | ||
|---|---|---|---|---|---|---|---|---|
| Numerical Hole Diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
| Optical Resolution @550nm (µm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||
| Depth of Focus (µm) | 48.6 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 | ||
| Working Distance (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | ||
| Field H x V (mm) | Video System 1024 x 1024 | 0.5X | 3.84 x 3.84 | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.192 x 0.192 | 0.096 x 0.096 |
| 0.75X | 2.56 x 2.56 | 1.28 x 1.28 | 0.64 x 0.64 | 0.32 x 0.32 | 0.128 x 0.128 | 0.064 x 0.064 | ||
| 1.0X | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.24 x 0.24 | 0.096 x 0.096 | 0.048 x 0.048 | ||
| Standard | Parameter | |||
|---|---|---|---|---|
| ISO 4287-1997 | Principal section | Roughness | Waviness | |
| Amplitude | Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku | Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku | Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku | |
| Interval | PSm,Pdq | RSm,Rdq | WSm,Wdq | |
| Substance | Pmr,Pdc | Rmr,Rdc,Rmr(Rz/4) | Wmr,Wdc,Wmr(Wz/4) | |
| Peak | PPc | RPc | WPc | |
| ISO 13565 | ISO 13565-2 | Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk | ||
| ISO 12085 | Roughness graph | R, AR, Rx, Nr | ||
| Waviness graph | W, AW, Wx, Wte | |||
| Other graph | Rke, Rpke, Rvke | |||
| AMSE B46.1 | 2D | Rt, Rp, Rv, Rz, Rpm, Rmax, Ra, Rq, Rsk, Rku, tp, Htp, Pc, Rda, Rdq, RSm, Wt | ||
| DIN EN ISO 4287-2010 | Original profile | Pa,Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu, PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra,Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, RPc, Rdq, Rdc, Rmr, | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc, Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
| JIS B0601-2013 | Original profile | Pa, Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu, PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra, Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, Rdq, Rdc, Rmr | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc, Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
| GBT 3505-2009 | Original profile | Pa, Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu ,PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra, Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, Rdq, Rdc, Rmr | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc,Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
| Standard | Parameter | |
|---|---|---|
| ISO 25178 | Height | Sq, Ssk, Sku, Sp, Sv, Sz, Sa |
| Function | Smr, Smc, S×p | |
| Space | Sal, Str, Std | |
| Composite Parameter | Sdq, Sdr | |
| Peak | PPc | |
| Volume | Vm, Vv, Vmp, Vmc, Vvc, Vvv | |
| Form | Spd, Spc, S10z, S5p, S5v, Sda, Sha, Sdv, Shv | |
| Functional | Sk, Spk, Svk, Smr1, Smr2, Spq, Svq, Smq | |
| ISO 12781 | Flatness | FLTt, FLTp, FLTv, FLTq |
| EUR 15178N | Amplitude | Sa, Sq, Sz, Ssk, Sku, Sp, Sv, St |
| Space | Str, Std, Sal | |
| Composite Parameter | Sdq, Sds, Ssc, Sdr, Sfd | |
| Area, Volume | Smr, Sdc | |
| Function | Sk, Spk, Svk, Sr1, Sr2, Spq, Svq, Smq | |
| Functional | Sbi, Sci, Svi | |
| EUR 16145 EN | Amplitude | Sa, Sq, Sy, Sz, Ssk, Sku |
| Mixed Parameter | Ssc, Sdq, Sdr | |
| Functional | Sbi, Sci, Svi, Sk, Spk, Svk | |
| Space | Sds, Std, Stdi, Srw, Srwi | |
| Hardness | Hs, Hvol, Hv, Hps, Hpvol, Hpv, Hap, Hbp | |
| ASME B46.1 | 3D | St, Sp, Sv, Sq, Sa, Ssk, Sku, SWt |
| SuperView W1 Host Machine | 1 pc | Standard |
| Interference Lens 10X | 1 pc | Standard |
| X, Y Object Table: Auto-moving Object Table | – | Standard |
| Video System: 1024*1024 pixels | – | Standard |
| Optical zoom: 0.5X | – | Standard |
| Calibration Module | 1 set | Standard |
| Joystick | 1 pc | Standard |
| Desktop Computer and Monitor | 1 set | Standard |
| XtremeVision Software | 1 set | Standard |
| Electrical Control Cabinet | 1 pc | Standard |
| Portable Inflating Pump | 1 set | Standard |
| Accessory Suitcase | 1 pc | Standard |
| User Manual | 1 set | Standard |
| Product Certificate and Warranty Card | 1 set | Standard |
| Interference Lens: 2.5X, 5X, 20X, 50X, 100X | – | Optional |
| Video System: 2048*2048 pixels | – | Optional |
| Optical zoom: 0.75X, 1X | – | Optional |
| Vacuum Object Table (dedicated for wafer IC) | – | Optional |
Contact us today to inquire about the SuperView W1 Nano 3D Optical Surface Profilometer and enhance your surface measurement capabilities.
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