The Pinnacle® III DC Power Supply delivers exceptional stability, fast arc response, and highly repeatable output to optimize thin-film deposition performance. Engineered for process reliability, this compact 3U full-rack generator minimizes variation, enhances yield, and offers advanced arc management with extremely low stored energy.
Lower operating and installation costs
Fast, configurable arc response
Wide full-power impedance range for maximum process efficiency
Precise output control for consistent deposition results
Extremely low stored energy: <1 mJ per 1 kW of output
No tap changes required
Output repeatability of ±0.1%
Target Conditioning Cycle (TCC) to reduce conditioning time
Joule Mode for optimized energy delivery
Cooling: Air
Input Voltage: 208 / 400 / 440 / 480 VAC
Power Levels: 5–20 kW
Rack Size: Full rack, 3U height
Output Voltage Range: 400–1000 V
Ignition Voltage: 1750 V
Communication Interfaces: Ethernet, EtherCAT, DeviceNet, ProfiNet, Profibus, RS-232/485, EtherNet/IP, analog control
Advanced Feature: Arc management system
Applications: Deposition processes
