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Oil-free design – clean, contamination-free vacuum environment.
Air-cooled system – no cooling water needed, easy installation anywhere.
Energy efficient – low power consumption from atmosphere down to ultimate pressure.
Quiet and reliable – low vibration, low noise, high stability.
High vacuum performance – achieves ultimate pressure up to 1 Pa.
Anest Iwata launched the world’s first dry scroll vacuum pump in 1992.
Unlike traditional pumps, the dry scroll vacuum pump does not use oil inside the pump and can continuously exhaust from atmospheric pressure. This breakthrough made clean vacuum technology widely accessible, expanding the global market beyond specialized facilities.
The ISP Series continues Anest Iwata’s legacy of innovation, providing:
Clean, oil-free operation with no lubricant maintenance.
Easy, cost-saving installation with an air-cooled system.
Consistent high performance across semiconductor, industrial, and laboratory use cases.
Semiconductor & Coating: sputtering, vacuum deposition, ion plating equipment.
Advanced Processes: electron beam processing, surface modification, accelerator, synchrotron radiation.
Thermal Applications: vacuum furnaces, heat treatment furnaces.
R&D and Testing: laboratory experiments, leak detectors, gas recovery, device handling system.
Industrial: vacuum packaging machine and other production equipment.
Proven Pioneer: inventor of the world’s first dry scroll pump.
Trusted Japanese Engineering: reliable, precise, and built to last.
Versatility: ideal for laboratories, semiconductor fabs, industrial plants, and research centers in Malaysia, ASEAN, and worldwide.
Malaysia
