Ex-M (Excellent Mega) Series single stage stainless steel regulators are designed for Instrument Analysis or Semiconductor Manufacturers where high purity must be maintained. This series regulators are more accuracy than our EX-mk II series and have been founded to have a leakage rate of less than 1 x 10-10 Acc/sec. of helium.
Specifications
| Models | EX-M-20 | EX-M-100 | EX-M-500 | EX-M-600 |
| Max. Inlet Pressure (kgf/cm2) | 220 | 220 | 30 | 30 |
| Max. Delivery Pressure (kgf/cm2) | 10 | 10 | 10 | 10 |
| Normal Flow Rate (NL/min) | 20 | 100 | 20 | 100 |
| Max. Flow Rate (NL/min) | 50 | 150 | 50 | 150 |
| Flow Coefficient (CV= | 0.05 | 0.05 | 0.17 | 0.17 |
| Temperature Range (℃) | －10～60 | －10～60 | －10～60 | －10～60 |
| Dew Point (℃) | -74 | -74 | -74 | -74 |
| Helium Leak Rate (Acc/sec) | "f1×10－10 | "f1×10－10 | "f1×10－10 | "f1×10－10 |
| Connections | 1/4 VCR or Tube | 1/4 VCR or Tub | 1/4 VCR or Tube | 1/4 VCR or Tube |
| Weight (kg) | 1.2 | 1.3 | 0.9 | 1.0 |
| Surface Finish | Electropolished Rmax. 0.7μm | |||
Malaysia
