Model :
| Model parameters | STAM25-100 | STAM25-200 | STAM25-300 | STAM25-400 | STAM25-500 | STAM25-600 |
| Stroke(mm) | 100 | 200 | 300 | 400 | 500 | 600 |
| grating scale resolution | 5nm (analog) other types of grating ruler resolution can be selected | |||||
| Repeatability (nm) | ±50 | ±50 | ±100 | ±150 | ±200 | ±250 |
| Positioning accuracy(µm) | 2um/100mm (less than 0.3um/100mm after compensation) | |||||
| Straightness(µm) | ±0.4 | ±0.5 | ±0.6 | ±0.75 | ±1 | ±1.5 |
| Flatness(µm) | ±0.4 | ±0.6 | ±0.6 | ±1 | ±1 | ±1.5 |
| Maximum speed | 2m/s | |||||
| Maximum acceleration (no load) | 2G | |||||
| Horizontal load (Kg) | 35kg | |||||
| Side load(Kg) | 20kg | |||||
Malaysia
