CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
Optimal for sputtering applications
Argon capacity is 2 times of existing model (U10H).
Extended intervals between regenerations means higher tool availability.
Multiple connections (up to 3) can be made.
