| 
						Pumping Speed, Operating Range | 
					
						65 l/sec Air, 90 l/s He and H2 | 
				
				
					| 
						Maximum Throughput | 
					
						0.19T-l/s (0.25 mbar-l/s) in operating range 0.30T-l/s (0.40 mbar-l/s) @ 0.01 torr   | 
				
				
					| 
						Compression Ratio | 
					
						4 x 107 (Air), 2 x 106 (helium) | 
				
				
					| 
						Operating Range | 
					
						3 x 10-3 to <5 x 10-8 torr (3.9 x 10-3 to 6.5 x 10-8 mbar) | 
				
				
					| 
						Maximum Forepressure | 
					
						No load: 0.75 torr (1.00 mbar) Full Load: 0.60 torr (0.78 mbar) | 
				
				
					| 
						Backstreaming Rate | 
					
						With cold cap: <2 x 10-4 mg/cm2/min With baffle: <2 x 10-5 mg/cm2/min | 
				
				
					| 
						Recommended Backing Pump | 
					
						≥1.5 cfm (2.5 m3/hr) | 
				
				
					| 
						Warmup Time | 
					
						7 minutes | 
				
				
					| 
						Cooldown Time | 
					
						10 minutes | 
				
				
					| 
						Fluid Charge | 
					
						30 cc | 
				
				
					| 
						Electrical Requirements | 
					
						1 ph, 50/60 Hz, 90/115/165/220 VAC | 
				
				
					| 
						Pump Power | 
					
						200/250 watts | 
				
				
					| 
						Air Cooling | 
					
						30 cfm |