| Model |
SURFCOM 2800G/1800G |
| -11 |
-12 |
-13 |
-14 |
-21 |
-22 |
-23 |
-24 |
| Measuring Range |
Z-axis (vertical) |
50mm |
| X-axis (horizontal) |
100mm |
200mm |
| Accuracy |
S1800G Series |
Roughness |
Measuring Range |
800µm range to 25µm range (6.4µm range) (*3) |
| Resolution |
0.02µm to 0.0004µm (0.0001µm) (*3) |
| Contour |
Z-axis Indication Accuracy (Vertical) |
±0.25% (full scale) |
| Resolution |
0.1µm/5mm range, 0.4µm/20mm range, 1µm/50mm range |
| S2800G Series |
Roughness |
Measuring Range |
800µm range to 25µm range (6.4µm range) (*3) |
| Resolution |
0.02µm to 0.0004µm (0.0001µm) (*3) |
| Contour |
Z-axis Indication Accuracy (Vertical) |
±(0.8 + l2Hl/100)µm (H: Measuring Height mm) |
| Resolution |
0.025µm/Full range |
| Common Item |
X-axis Indication Accuracy (Horizontal) |
±(1 + 2L/100)µm (L: Measuring Length mm) |
| Resolution |
0.04µm |
| Tracing Driver |
Straightness Accuracy |
Roughness |
0.05 + 1.5L/100)µm (L: Measuring Length mm) |
| Contour |
1µm/100mm |
2µm/200mm |
| Sensing Method |
Moire stripped scale |
Linear scale |
| Measuring Speed |
0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6 mm/s (8 speeds) |
| Column up/down speed (Z-axis) |
– |
10mm/s (3mm/s) (*1) |
– |
10mm/s (3mm/s) (*1) |
| Detector |
Sensing Method |
S1800G |
Roughness |
Differential transducer |
| Contour |
| S2800G |
Roughness |
| Contour |
Laser optical diffraction scale |
| Roughness Measurement |
Stylus, measuring force |
Replaceable, 0.75mN |
| Stylus radius (material) |
Roughness: 2µmR (60° conical diamond) Waviness: 800µmR (Ruby Ball) Each stylus equipped as standard |
| Contour Measurement |
Stylus, measuring force, function |
Replaceable, 10mN to 30mN, and stepless (retraction) function |
| Stylus radius (material) |
25µmR (24° conical carbide) Two pieces equipped as standard |
| Measuring direction, position |
Pull/push and Up/down directions, Max. following angle: 77° |
| Operation Range |
Tracing driver stroke |
100mm |
200mm |
| Column up/down stroke |
250mm |
450mm |
250mm |
450mm |
| Granite Table |
|
Dimension |
600 x 317mm |
1000 x 450mm |
600 x 317mm |
1000 x 450mm |
| Permissible loading weight |
In use of desktop anti-vibration table (E-VS-S57B/S58B) |
40kg |
34kg |
25kg |
– |
34kg |
28kg |
19kg |
– |
| In use of large size desktop anti-vibration table (E-VS-S45A) |
50kg |
40kg |
30kg |
90kg |
50kg |
40kg |
30kg |
84kg |
| In use of anti-vibration table (E-VS-R16B) |
50kg |
40kg |
30kg |
40kg |
50kg |
40kg |
30kg |
34kg |
| In use of anti-vibration table (E-VS-R21B) |
50kg |
40kg |
30kg |
100kg |
50kg |
40kg |
30kg |
100kg |
| Other |
Installation Dimension (*2) |
Width |
2000mm |
2300mm |
2000mm |
2300mm |
| Depth |
1000mm |
1000mm |
| Height |
1700mm |
1900mm |
1700mm |
1900mm |
| Weight |
120kg |
125kg |
135kg |
240kg |
125kg |
135kg |
140kg |
245kg |
| Power Supply, frequency consumption |
Single phase AC 100V ±10% (grounding required), 50Hz/60Hz, 710VA |
Malaysia
