详情
Infex 10 Series Integrated Roughness and Contour Measuring Instrument
Cost-effective roughness and contour one time measurement solution.
Adopt high rigidity, high accuracy, maintenance-free linear motion guide rail, can control the measuring system with high precision performance.
Technical Specification
|
Model |
Infex 10 |
|
Column |
Measuring range |
0-620mm optional |
|
Drive unit |
Measuring range |
0-220mm optional |
|
Indicating accuracy |
±(0.8+2L/100)μm |
|
Straightness |
≤0.3μm/100mm |
|
Detector |
Measuring range |
±10mm |
|
Z1 axis contour indicating accuracy |
≤±(0.8+|0.12H|)μm |
|
Z1 axis roughness indicating accuracy |
≤±(8nm+3.5%) |
|
Repeatability |
1δ≤2nm |
|
Residual noise |
≤0.012μm |
|
Stylus |
Standard,diamond 5μm/90° |
|
Measuring accuracy |
Arc |
≤±(1.2+R/12)μm |
|
Arc Pt |
≤±0.3μm |
|
Angle |
≤±1′ |
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