Standard XYθ-axis Ball Screw Feed Type UVW Alignment Platform (XXY Series)

Standard XYθ-axis Ball Screw Feed Type UVW Alignment Platform (XXY Series)

Category: PRECISION POSITIONING STAGE Available
For more information, visit our official website at sem-eq.com

Description




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Features :
 
  1. The XXY series alignment table offers precise alignment and a compact size.
  2. Its modular design results in a compact structure, small footprint, light weight, and excellent rigidity.
  3. It can be widely used in various automated equipment, including panel laminators, panel film laminators, semiconductor equipment, soft-mount equipment, PCB exposure equipment, and 3D curved surface lamination equipment.
  4. Its repeatable positioning accuracy reaches micrometers, helping customers solve various precise alignment tasks.  
  5. A 28-inch stepper motor is standard. 



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Specifications :

 
Model XXY150-150-58-1 XXY180-150-62-1
Movement amount ±3mm ±4mm
Sliding countertop size 150x150 mm
Base size 150x150 mm 180x180 mm
Feed screw (ball screw) Φ6 lead 1
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Weight About 3kg About 3.2kg
Angle ±2° ±3°
Mesa Flatness 10um
Position accuracy 20um
Repeat position accuracy ±4um
Load 10kgf 15kgf
Parallelism 10um
Limit sensor 2
Origin sensor 1


Model XXY180-160-62-1 XXY180-180-62-1
Movement amount ±4mm
Slide table  size 160x160 mm 180x180 mm
Base size 180x180 mm
Feed screw (ball screw) Φ6 lead 1
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 3.2kg About 3.4kg
Angle ±3°
Mesa Flatness 10um
Position accuracy 20um
Repeat position accuracy ±4um
Load 15kgf
Parallelism 10um
Limit sensor 2
Origin sensor 1

 
Model XXY210-190-65-1 XXY230-200-75-1
Movement amount ±5mm
Slide table  size 190x190 mm 200x200 mm
Base size 210x210 mm 230×230 mm
Feed screw (ball screw) Φ8 lead 1
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 5.6kg About 6.2kg
Angle ±3°
Mesa Flatness 20um
Position accuracy 15um
Repeat position accuracy ±4um
Load 30kgf
Parallelism 30um
Limit sensor 2
Origin sensor 1

 
Model XXY280-250-79.5-1 XXY350-350-105-2
Movement amount ±5 mm
Sliding contertop  size 250x250 mm 350x350 mm
Base size 280x280 mm 350x350 mm
Feed screw (ball screw) Φ8 lead 1 Φ 12 Lead 2
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 8 kg About 12 kg
Angle ±3° ±2°
Mesa Flatness 20 um 30 um
Position accuracy 20um
Repeat position accuracy ±4um
Load 30 kgf 100 kgf
Parallelism 30 um 50 um
Limit sensor 2
Origin sensor 1
 
 
Model XXY450-350-105-2 XXY400-380-105-2
Movement amount ±5 mm
Sliding contertop  size 350x350 mm 380x380 mm
Base size 450x450 mm 400x400 mm
Feed screw (ball screw) Φ 12 Lead 2
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 18kg About 12 kg
Angle ±1.8°
Mesa Flatness 30um
Position accuracy 30um
Repeat position accuracy ±4um
Load 100 kgf
Parallelism 50um
Limit sensor 2
Origin sensor 1
 
 
Model XXY550-450-113 -2 XXY650-550-123-2
Movement amount ±5 mm
Sliding contertop  size 450x450 mm 550x550 mm
Base size 550x550 mm 650x650 mm
Feed screw (ball screw) Φ 12 Lead 2
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 24kg About 27kg
Angle ±1.5° ±1°
Mesa Flatness 30um
Position accuracy 30um
Repeat position accuracy ±4um
Load 100 kgf
Parallelism 50um
Limit sensor 2
Origin sensor 1
 
 
Model XXY750-650-133 -2 XXY1000-900-153-2
Movement amount ±5 mm
Sliding contertop  size 650x650 mm 900x900 mm
Base size 750x750 mm 1000x1000 mm
Feed screw (ball screw) Φ 12 Lead 2
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 31kg About 45kg
Angle ±1° ±0.5°
Mesa Flatness 30um
Position accuracy 30um
Repeat position accuracy ±4um
Load 100 kgf
Parallelism 50um
Limit sensor 2
Origin sensor 1
 
Model XXY115-95-57-1 XXY165-150-70-2
Movement amount ±7.5 mm ±10 mm
Slide table  size 95x95 mm 150x150 mm
Base size 115x115 mm 165x165 mm
Feed screw (ball screw) Φ 8 Lead 1 Φ 8 Lead 2
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 3kg
Angle ±7.5° ±10°
Mesa Flatness 30 um
Position accuracy 15 um 12 um
Repeat position accuracy ±2um ±3um
Load 5kgf 13kgf
Parallelism 30um
Limit sensor 2
Origin sensor 1
 
Model XXY170-160-50-1 XXY170-160-55-1
Movement amount ±4 mm ±7.5 mm
Slide table  size 160x160 mm
Base size 170x170 mm
Feed screw (ball screw) Φ 6 Lead 1
Guide Crossed roller sub-rail
Main material - surface treatment Steel-Black Chrome Aluminum - black anode
Self-respect About 4kg
Angle ±3.5° ±7°
Mesa Flatness 30 um
Position accuracy 12 um
Repeat position accuracy ±3 um ±5 um
Load 20kgf 30kgf
Parallelism 30 um
Limit sensor 2
Origin sensor 1
 
Model XXY200-150-72-2 XXY230-200-95-2
Movement amount ±5 mm ±15 mm
Slide table  size 150x150 mm 200x200 mm
Base size 200x200 mm 230x230 mm
Feed screw (ball screw) Φ 8 Lead 2 Φ 12 Lead 2
Guide Crossed roller sub-rail
Main material - surface treatment Steel-Black Chrome Aluminum - black anode
Self-respect About 7kg About 8kg
Angle ±5° ±10.5°
Mesa Flatness 30 um 50 um
Position accuracy 12 um
Repeat position accuracy ±1 um ±3 um
Load 12kgf  30 kgf
Parallelism 50um 80um
Limit sensor 2
Origin sensor 1


 
Model XXY230-200-95-2-L XXY230-200-95-2-R
Movement amount ±15 mm
Slide table  size 200x200 mm
Base size 230x230 mm
Feed screw (ball screw) Φ 12 Lead 2
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 8kg
Angle ±10.5°
Mesa Flatness 25 um
Position accuracy 12 um
Repeat position accuracy ±3 um
Load 30 kgf
Parallelism 30 um
Limit sensor 2
Origin sensor 1

Model XXY120-100-35-1 XXY170-160-45-1
Movement amount ±2 mm ±5 mm
Slide table  size 100x100 mm  160x160 mm
Base size 120x120 mm 170x170 mm
Feed screw (ball screw) Φ 6 Lead 1
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 2kg About 6kg 
Angle ±2° ±3°
Mesa Flatness 30 um
Position accuracy 8 um 10 um
Repeat position accuracy ±2um
Load 10kgf 30kgf
Parallelism 30 um
Limit sensor 2
Origin sensor 1


 
Model XXY220-200-80-1 XXY320-300-90-2
Movement amount ±5mm
Slide table  size 200x200 mm 300x300 mm
Base size 200x200 mm 320x320 mm
Feed screw (ball screw) Φ 8 Lead 1 Φ 10 Lead 2
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 2kg About 6kg 
Angle ±3°
Mesa Flatness 30 um 50 um
Position accuracy 10 um
Repeat position accuracy ±1um
Load 60kgf 100kgf
Parallelism 30 um
Limit sensor 2
Origin sensor 1
 
Model XXY294-280-105-5 XXY294-280-115-5
Movement amount ±15mm ±15.3mm
Slide table  size 280x80 mm 280x60 mm
Base size 294x219 mm
Feed screw (ball screw) Φ 16 Lead 5 Φ 12 Lead 5
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 9kg
Angle ±8°
Mesa Flatness 80um
Position accuracy 12um
Repeat position accuracy ±4um
Load 40kgf
Parallelism 80 um
Limit sensor 2
Origin sensor 1
 
Model XXY458-360-105-5 XXY458-360-115-5
Movement amount ±21mm
Slide table  size 360x100 mm
Base size 458x169 mm 458x211 mm
Feed screw (ball screw) Φ 12 Lead 5 Φ 16 Lead 5
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect about 7kg
Angle ±8°
Mesa Flatness 80um
Position accuracy 12um
Repeat position accuracy ±4um
Load 40kgf
Parallelism 80 um
Limit sensor 2
Origin sensor 1
 

 
Model XXY280-218-95-5 XXY450-384-76-1
Movement amount ±15 mm
Slide table  size  218x164 mm 384 x 384 mm
Base size 280 x 188 mm 450 x 450 mm
Feed screw (ball screw) Φ 12 Lead 5 Φ 8 Lead 1
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 9 kg About 17 kg
Angle ±8.5° ±5°
Mesa Flatness 30 um 100 um
Position accuracy 20 um 12 um
Repeat position accuracy ±5 um ±3 um
Load 25 kgf 5 kgf
Parallelism 30 um 120 um
Limit sensor 2
Origin sensor 1


 
Model XXY550-450-105-2 XXY600-600-115-2
Movement amount ±10 mm ±15mm
Slide table  size 450 x 450 mm 600 x 300 mm
Base size 550 x 550 mm 600 x 300 mm
Feed screw (ball screw) Φ 14 Lead 2 Φ 12 Lead 2
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 25kg About 16kg
Angle ±3°
Mesa Flatness 30 um 80 um
Position accuracy 12 um
Repeat position accuracy ±4um
Load 30 kgf 35 kgf
Parallelism 50 um 100 um
Limit sensor 2
Origin sensor 1


 
Model XXY620-700-105-5-YZ
Movement amount ±23mm
Slide table  size 700x130 mm
Base size  620x163 mm
Feed screw (ball screw) Φ 12 Lead 5
Guide Crossed roller sub-rail
Main material - surface treatment Aluminum - black anode
Self-respect About 13kg
Angle ±7°
Mesa Flatness 80um
Position accuracy 8um
Repeat position accuracy ±4um
Load 40kgf
Parallelism 100um
Limit sensor 2
Origin sensor 1
     

 
Model XXY580-700-110 -5 XXY800-800-110-5
Movement amount ±15mm ±15mm
Slide table  size 700x500 mm 800x800 mm
Base size 580x540 mm 800x800 mm
Feed screw (ball screw) Φ 12 Lead 5
Guide Cross sub-rail rolled 
Main material - surface treatment Aluminum - black anode
Self-respect About 40kg About 55kg
Angle ±3°
Countertop Flatness 150 um
Position accuracy 12 um
Repeat position accuracy ±3 um ±4 um
Load 54 kgf 100 kgf
Parallelism 100um
Limit sensor 2
Origin sensor 1

Model XXY1100-1000-160-5
Movement amount ±22mm
Slide table  size 1000x800 mm
Base size 1100x900 mm
Feed screw (ball screw) Φ 20 Lead 5
Guide Straight line guide
Main material - surface treatment Aluminum - black anode
Self-respect About 60kg
Angle ±3°
Countertop Flatness 120 um
Position accuracy 12 um
Repeat position accuracy ±4um
Load 500 kgf
Parallelism 300 um
Limit sensor 2
Origin sensor 1


 
Model XXY1225-1300-115-5
Movement amount ±25mm
Slide table  size 1300x200 mm
Base size 1225x200 mm
Feed screw (ball screw) Φ 16 Lead 5
Guide Straight line guide
Main material - surface treatment Aluminum - black anode
Self-respect About 75 kg
Angle ±3°
Messa Flatness 120 um
Position accuracy 12 um
Repeat position accuracy ±4 um
Load 60 kgf
Parallelism 300 um
Limit sensor 2
Origin sensor 1


 

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