Standard XYθ-axis Ball Screw Feed Model Electric Three-axis Stage (AXYR Series)

Standard XYθ-axis Ball Screw Feed Model Electric Three-axis Stage (AXYR Series)

Category: PRECISION POSITIONING STAGE Available
For more information, visit our official website at sem-eq.com

Description




Model :

 



 

 

 

 

Features :

 
  1. The AXYR series translation stages are our independently developed, multi-axis, integrated motorized translation stages.
  2. They are primarily constructed of aluminum alloy, with a black anodized surface treatment that effectively prevents light reflection and offers excellent rust resistance.
  3. The integrated X, Y, and θ axes create a compact design, requiring minimal space and accommodating a wide range of workstations.
  4. The AXYR60-R-CB comes standard with a 28-inch stepper motor.
  5. The AXYR70-CB comes standard with a 28-inch stepper motor. 
 

Diagram :



 

Dimension :

 

 


 


 

 

Specifications :

 
Model AXYR70-CB AXYR60-R-CB
Movement amount ±8.5° ±5°
Slide countertop 60 x 60 mm  70 x 70 mm
XY axis travel ±7.5 mm ±5.0 mm
Feed screw (ball screw) Φ6 lead 1
Guide Cross guide rail
Main material - surface treatment Aluminum - black anode
Self-respect About 2.12kg About 2. 25kg
X-axis Maximum speed 10mm/sec
XY-axis Maximum speed 8°/sec 12.7°/sec
Positioning accuracy Within 10um
XY Repeat accuracy ±1um
Axis position accuracy 0.05°
Axis repeat accuracy ±0.01° ±0.003°
Load 6kgf 7kgf
Parallelism Within 30um
Limit sensor 2
Origin sensor 1
 
Model AXYR120-R-CB AXYR80-R-CB
Movement amount ±10° ±5°
Slide countertop 80 x 80 mm  120 x 120 mm
XY axis travel ±12 mm ±15 mm
Feed screw (ball screw) Φ8 lead 1
Guide Cross guide rail
Main material - surface treatment Aluminum - black anode
Self-respect About 2.34kg About 2.86kg
XY-axis Minimum speed 10mm/sec
XY-axis Maximum speed 8°/sec
XY Positioning accuracy Within 10um
XY Repeat accuracy ±1um
Axis position accuracy 0.05°
Axis repeat accuracy ±0.01°
Load 10kgf 25kgf
Parallelism Within 30um
Limit sensor 2
Origin sensor 1
 
Model AXYR130-CB AXYR200-CB
Movement amount ±5°
Slide countertop 130x130 mm 210x150 mm
XY axis travel ±5° mm ±15 mm
Feed screw (ball screw) Φ6 lead 1
Guide Cross guide rail
Main material - surface treatment Aluminum - black anode
Self-respect About 4kg About 5. 15kg
XY-axis Maximum speed 10mm/sec
Maximum positioning speed 6.74°/sec 4.98°/sec 
XY Positioning accuracy Within 10um
XY Repeat accuracy ±1um
Axis position accuracy 0.05°
Axis repeat accuracy ±0.003°
Load 6kgf 7kgf
Parallelism Within 30um
Limit sensor 2
Origin sensor 1

Model AXYR120-L/R
XY axis travel ±20mm
R axis travel ±10°
Feed screw (ball screw) Φ6 lead 1
Guide Crossed roller guide
Main material - surface treatment Aluminum - black anode
Self-respect About 4.8kg
Maximum speed 100mm/sec
XY axis bit precision 0.015 mm
R axis bit precision 0.06°
XY axis Repeat bit precision ±0.005 mm
R axis repeat bit precision ±0.012°
Load 25kgf
Parallelism 0.06mm
Limit sensor 2
Origin sensor 1




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SEM Equipment Sdn. Bhd.
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