PRECISION POSITIONING STAGE
XYθ-axis Direct Drive Motion Standard Model Micro-alignment Stage (XYθ Series)
XYθ-axis Direct Drive Motion Standard Model Micro-alignment Stage (XYθ Series)

 

XYθ-axis Direct Drive Motion Standard Model Micro-alignment Stage (XYθ Series)

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Deskripsi




Model :

 





 


 


 

 

Features :
 
  1. Equipped with a high-resolution encoder for fully closed-loop control
  2. Utilizes direct-drive linear (DDL) and direct-drive rotary (DDR) powertrains
  3. Simpler structure, higher positioning accuracy, and shorter alignment time


Diagram :


 

Dimension :
 

 
 

   

Specifications :
Model ΧΥΘ80
Moving direction X-axis Y axis  axis
Journey (mm) ±10 360°
Load (kgf) < 0.5 +  < 0.5 +  + X <0.5
Positioning accuracy (um) ±5 ±200arc/sec
Duplicate targeting Accuracy (um) ±2.5 ±5arc /sec
Horizontal straightness (um) ≤10 /
Vertical straightness (um) ≤10 /
Material Aluminum alloy
Resolution 1 23bit
Origin reference External origin /
External signal Origin, positive limit, negative limit /

 
Model ΧΥΘ100
Moving direction X-axis Y axis  axis
Journey (mm) ±10 360°
Load (kgf) <2 +  < 2 +  + X <2
Positioning accuracy (um) / ±50arc/sec
Duplicate targeting Accuracy (um) ±2.5 ±5arc /sec
Horizontal straightness (um) ≤10 /
Vertical straightness (um) ≤10 /
Material Aluminum alloy
Resolution 1 23bit
Origin reference External origin /
External signal Origin, positive limit, negative limit /


 
Model ΧΥΘ120
Moving direction X-axis Y axis  axis
Journey (mm) ±10 360°
Load (kgf) <2 +  < 2 +  + X <2
Positioning accuracy (um) ±1.5 ±150arc/sec
Duplicate targeting Accuracy (um) ±1 ±5arc /sec
Horizontal straightness (um) ≤10 /
vertical straightness (um) ≤10 /
Material 45#
resolution 1 23bit
origin reference external origin /
external signal Origin, positive limit, negative limit /


 
Model ΧΥΘ170
Moving direction X-axis Y axis  axis
Journey (mm) ±10 360°
Load (kgf) < 12 +  < 12 +  + X <12
Positioning accuracy (um) ±5 ±150arc/sec
Duplicate targeting Accuracy (um) ±2.5 ±5arc /sec
Horizontal straightness (um) ≤10 /
vertical straightness (um) ≤10 /
Material Aluminum alloy
resolution 1 23bit
origin reference external origin /
external signal Origin, positive limit, negative limit /



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SEM Equipment Sdn. Bhd.
SEM Equipment Sdn. Bhd. Industrial Equipment Manufacturer, Ultrasonic Equipment Supplier, Laser Equipment Supply in Johor Bahru (JB), Malaysia ~ SEM Equipment Sdn. Bhd.
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