・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SMC Automation (Malaysia) Sdn BhdPneumatic Equipment Supplier Malaysia, Selangor, Control Valve Supply KL, Penang, Vacuum Pad Supplies JB, Perak, Melaka ~ SMC Automation (Malaysia) Sdn Bhd