High Purity Gas Regulators
Chiyoda Seiki’s “Excellent” series high purity gas regulators are carefully constructed for using properly in electronic, aerospace and ultra-pure gas system fields. Ex-mk II Series are consisted in three grades, such as G1, G2 and G3. Each grade product is constructed under careful consideration about the construction. Applications: Analysis Carrier Gases, Semiconductor Manufacturing Gases, Poisonous & corrosive gases.
| Grade | G1 | G2 | G3 |
| Helium leak rate Connections | "f1×10－8 Acc/sec. 1/4VCR or Tube | "f1×10－7 Acc/sec. Screw in | Compressed He 12hours Screw in |
| Cleaning Assembling Material Packaging | Tow-steps ultrasonically cleaning In a Class 1000 Clean room Stainless steel 316 Packed in a polyethylene film under N2 |
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| Models | EX-500mkⅡ | EX-600mkⅡ | EX-700mkⅡ | EX-1000mkⅡ | EX-4000 |
| Max. Inlet Pressure (kgf/cm2) | 30 | 30 | 20 | 10 | 10 |
| Max. Delivery Pressure (kgf/cm2) | 10 | 10 | 10 | 8 | 8 |
| Normal Flow Rate (NL/min) | 20 | 100 | 300 | 1000 | 4000 |
| Max. Flow Rate (NL/min) | 50 | 150 | 450 | 2000 | 5000 |
| Flow Coefficient (CV= | 0.17 | 0.17 | 0.60 | 1.75 | 3.58 |
| Temperature Range (℃) | －10～60 | －10～60 | －10～60 | －10～60 | －10～60 |
| Dew Point (℃) | －70 | －70 | －70 | －70 | －70 |
| Helium Leak Rate (Acc/sec) | "f1×10－8 | "f1×10－8 | "f1×10－7 | "f1×10－6 | "f1×10－6 |
| Weight (kg) | 0.9 | 1.0 | 3.5 | 6.0 | 16 |
Malaysia
