Model :
Model parameters | STAM-062- 100 × 100 |
STAM-062- 150 × 150 |
STAM-062- 200 × 200 |
STAM-053- 250 × 250 |
STAM-053- 300 × 300 |
STAM-053- 400 × 400 |
STAM-053- 500 × 500 |
Rail type | Plane common rail air floating guide | ||||||
XMotor specifications | Three-phase coreless motor: 60N continuous and 210N peak | ||||||
Y axis | 60N/210N (single drive) |
60N/210N (single drive) |
60N/210N (single drive) |
120N/420N (dual drive) |
120N/420N (dual drive) |
120N/420N (dual drive) |
120N/420N (dual drive) |
Stroke(mm) | 100 | 150 | 200 | 250 | 300 | 400 | 500 |
grating scale resolution | 5nm (analog) other types of grating ruler resolution can be selected | ||||||
Repeat positioning accuracy (μm) | ±0.1 | ||||||
Positioning accuracy (µm (before compensation)*1) | ±1 | ±1.5 | ±2 | ±2 | ±2.5 | ±3 | ±4 |
Positioning accuracy (µm (after compensation)*1) | ±0.5 | ||||||
Straightness(µm) | ±0.4 | ±0.5 | ±0.6 | ±0.75 | ±1 | ±1.5 | ±1.5 |
Flatness(µm) | ±0.4 | ±0.6 | ±0.6 | ±1 | ±1 | ±1.5 | ±1.5 |
Maximum speed*2 | 2m/s | ||||||
Speed stability*3 | ≤1% | ||||||
X-axis (upper axis) maximum acceleration (no load) | 4G | ||||||
Y axis (lower axis) maximum acceleration (no load) | 2G | 1.7G | 1.5G | 2G | 2G | 1.6G | 1.4G |
Maximum load(Kg) | 15 | ||||||
Air source working pressure | 0.3-0.48MPa | ||||||
Technical description | Note 1: This data is the upper limit of the laboratory measured data. This data is the calibrated parameter. If you have higher requirements, please consult the manufacturer. | ||||||
Note 2: The maximum speed of the platform depends on the effective stroke, grating resolution, and the clock frequency of the grating and driver. Different configurations will cause the upper limit of this parameter to change. Please contact the manufacturer for details. | |||||||
Note 3: Speed uniformity is also called speed error, which is closely related to the speed range. The slower the speed, the greater the speed error ratio. For applications below 1mm/s, it is recommended to use a linear drive. |