Air-floating Single-axis Linear Precision Motion Platform (STAM25 Series)

Air-floating Single-axis Linear Precision Motion Platform (STAM25 Series)

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详情




Model : 

 



Dimension :


 

Specifications :

 
Model parameters STAM25-100 STAM25-200 STAM25-300 STAM25-400 STAM25-500 STAM25-600
Stroke(mm) 100 200 300 400 500 600
grating scale resolution 5nm (analog) other types of grating ruler resolution can be selected
Repeatability (nm) ±50 ±50 ±100 ±150 ±200 ±250
Positioning accuracy(µm) 2um/100mm (less than 0.3um/100mm after compensation)
Straightness(µm) ±0.4 ±0.5 ±0.6 ±0.75 ±1 ±1.5
Flatness(µm) ±0.4 ±0.6 ±0.6 ±1 ±1 ±1.5
Maximum speed 2m/s
Maximum acceleration (no load) 2G
Horizontal load (Kg) 35kg
Side load(Kg) 20kg


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