Integrated low-pressure plasma cleaning machine: Top Choice in Malaysia, Penang, Kuala Lumpur (KL), Selangor LUX & BRILLIANCE TECHNOLOGIES SDN. BHD.

Description

Options
• Vacuum pump: Oil pump or dry pump;
• Up to two additional gas inlets.

Industrial Plasma Cleaning Machine are widely used in scientific research institutions, enterprise R&D units and small batch production proofing. Plasma cleaning machine is a cleaning equipment that uses plasma to remove pollutants on the surface of materials. The equipment adopts PLC touch screen control and automatic matching power supply. It quickly generates a vacuum pressure of 1-20 Pa through a vacuum pump.

At the same time, according to customer process requirements, different mixed process gases are introduced into the vacuum reaction chamber to ionize the introduced process gas to generate plasma. During the working process, the high-energy particles in the plasma react chemically or physically bombard the surface pollutants, causing the pollutants to dissociate, oxidize or reduce to form volatile products, thereby achieving the effect of cleaning the surface pollutants.

Advantages

•The plasma cleaning machine has high cleaning efficiency and a wide range of applications;
•There are no requirements for the appearance, size, material, etc. of the cleaning sample;
•During the cleaning process, the temperature rise is relatively small and can basically reach room temperature;
•The RF power can be continuously adjusted, and the efficient special electrode is the guarantee for the generation of uniform plasma;
•The unique overload, overheating and short-circuit protection circuit can ensure the stability and safety of the RF power supply;
•The equipment adopts a modular design, and installation and maintenance are extremely simple.

Technical Data

Model	NE-PE40(F)	NE-PE60(F)	NE-PE80(F)
Control Cabinet	350(L)405(W)370(H) mm	400(L)450(W)370(H) mm	450(L)465(W)355(H) mm
Geometry	685(L)830(W)1450(H) mm	905(L)1070(W)1740(H) mm	1100(L)1145(W)1760(H) mm
Plasma Generator	40KHz/13.56MHz 1000W/500W	40KHz/13.56MHz 2000W/500W	40KHz/13.56MHz 2000W/1000W
Chamber Volume	40L	60L	80L
Gas Supply	2 gas channels via MFCs/Float Flowmeter	2 gas channels via MFCs/Float Flowmeter	2 gas channels via MFCs/Float Flowmeter
Control	PLC+HMI	PLC+HMI	PLC+HMI
Power Supply	AC380V, 50/60Hz	AC380V, 50/60Hz	AC380V, 50/60Hz

Model	NE-PE110(F)	NE-PE160(F)	NE-PE210(F)
Control Cabinet	500(L)500(W)470(H) mm	550(L)600(W)500(H) mm	600(L)600(W)600(H) mm
Geometry	940(L)1085(W)1765(H) mm	1170(L)1190(W)1825(H) mm	1350(L)1200(W)1850(H) mm
Plasma Generator	40KHz/13.56MHz 3000W/1000W	40KHz/13.56MHz 3000W/1000W	40KHz/13.56MHz 3000W/1200W
Chamber Volume	100L	165L	210L
Gas Supply	2 gas channels via MFCs/Float Flowmeter	2 gas channels via MFCs/Float Flowmeter	2 gas channels via MFCs/Float Flowmeter
Control	PLC+HMI	PLC+HMI	PLC+HMI
Power Supply	AC380V, 50/60Hz	AC380V, 50/60Hz	AC380V, 50/60Hz

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