Phenom XL G3 Desktop SEM

Category: DESKTOP SCANNING ELECTRON MICROSCOPES (SEM) Available
For more information, visit our official website at atomic-solutions.net

Description

Phenom XL G3 Automated Desktop SEM for Quality Control

Versatile large-sample desktop SEM for automated quality control, fast high-throughput imaging, optional EDS elemental analysis, optional SED surface imaging, and Python-ready workflow automation.

Product Overview

Phenom XL G3 is a versatile desktop SEM developed to automate quality control by delivering accurate, reproducible results while freeing up time for value-added work.

The system combines an easy-to-learn interface, fast vent/load operation, large-sample handling, and dependable SEM imaging performance in a desktop format suited to industrial and laboratory environments. It is designed for users who need higher throughput, larger sample support, and more repeatable inspection workflows than smaller desktop SEM platforms can typically offer. 

The Phenom XL G3 features full-screen images and an average time-to-image of about 40 seconds, helping users move quickly from loading to inspection. Its proprietary venting and loading mechanism is designed for very fast sample exchange, while the integrated interface reduces training time for both new and experienced users. 

Standard backscattered electron imaging supports sharp images with chemical contrast information, while optional EDS adds elemental analysis and optional SED adds surface-sensitive imaging. With ProSuite applications, Python-based automation through the Phenom Programming Interface, and the optional eucentric sample holder, the Phenom XL G3 is especially well suited for repetitive industrial workflows, particles, pores, fibers, roughness studies, and larger-scale analytical inspection. 

Key Specifications

  • Light Optical Magnification3× to 16×
  • SEM Magnification160× to 200,000×
  • Resolution< 9 nm
  • Acceleration Voltages2, 5, 10, 15, 20 kV; advanced mode adjustable from 4.8 to 20.5 kV
  • Vacuum LevelsLow, medium, high
  • Sample SizeMaximum 100 × 100 mm, maximum 40 mm height
  • Scan Area50 × 50 mm standard, 100 × 100 mm optional
  • PowerSingle phase AC 100–240 V, 50/60 Hz, 300 W max

Main Features

Built for Quality Control

Automates quality control workflows with accurate, reproducible results and an interface designed to reduce operator training time. 

Large Sample Handling

Supports samples up to 100 × 100 mm with up to 40 mm height, making it suitable for larger parts, broader scan areas, and more flexible inspection tasks. 

Automation Ready

Standard access through PPI, the Phenom Programming Interface, enables Python scripting for repetitive SEM workflows involving particles, pores, fibers, and large SEM images. 

Optional Expanded Capability

Optional EDS, optional SED, ProSuite application support, and the optional eucentric sample holder extend the system for elemental, topographic, and multi-angle analysis. 

Optimized Product Content

The Phenom XL G3 Desktop SEM is designed to automate the quality control process while maintaining fast, accessible SEM operation. Its all-new user interface uses proven ease-of-use concepts from Thermo Scientific desktop SEM platforms and now integrates analysis workflow, interactive data bars, and overlay controls to simplify operation even further. 

The platform is ideal for a wide range of applications because it combines a user-friendly operating environment with high throughput, improved large-sample capability, and a reliable backscattered electron imaging system. The standard four-segment BSD yields sharp images and provides chemical contrast information, while the high-sensitivity electron optical detector supports compositional and topographical modes. 

For facilities that require deeper sample analysis, the ProSuite application platform adds software options such as ParticleMetric, PoroMetric, FiberMetric, and 3D Roughness Reconstruction to extend the Phenom XL G3 beyond basic imaging into more advanced inspection and characterization workflows. 

Quality Control Benefits

  • Fast Time-to-ImageAverage time-to-image of approximately 40 seconds
  • High ThroughputFast proprietary vent/load mechanism for efficient repetitive use
  • Ease of UseEasy-to-learn interface for existing and new users
  • Chemical ContrastStandard four-segment BSD provides sharp images with chemical contrast information
  • Expanded AnalysisOptional EDS, optional SED, and ProSuite applications broaden analytical capability

Imaging Specifications

  • Light Optical Imaging3× to 16× magnification with bright field and dark field modes
  • Electron Optical Imaging160× to 200,000× magnification
  • Electron SourceLong-life 3,000-hour CeB source with multiple beam currents
  • Image FormatsJPEG, TIFF, BMP
  • Image Resolution Options960 × 600, 1920 × 1200, 3840 × 2400, and 7680 × 4800 pixels
  • Digital Image DetectionHigh-resolution color navigation camera, single-shot, plus high-sensitivity BSE detector
  • Data StorageUSB flash drive, network, workstation with SSD
  • Sample StageComputer-controlled motorized X and Y

Optional EDS Element Identification

The Phenom XL G3 can be equipped with an optional EDS detector for element identification through X-ray analysis. Because high-resolution imaging is performed at the same working distance as EDS analysis, the workflow is faster and easier to manage in routine analytical environments. Live EDS supports immediate point-and-click element identification in imaging mode, while more advanced analysis can be completed through integrated EID tools. 

The dedicated Element Identification software controls the fully integrated EDS detector without requiring users to switch between separate software packages or computers. Smart algorithms, advanced peak analysis, organized project handling, and manual adjustment options support structured and reliable X-ray analysis. 

  • Detector TypeSilicon Drift Detector, thermoelectrically cooled, LN free
  • Detector Active Area25 mm²
  • X-ray WindowUltra-thin silicon nitride window allowing detection of elements B to Am
  • Energy ResolutionMn Kα ≤132 eV
  • Processing2048 channels at 10 eV/ch, maximum input count rate 300,000 cps
  • SoftwareIntegrated in Phenom ProSuite with auto-peak ID, iterative strip peak deconvolution, confidence of analysis indicator, and export functions
  • Report FormatDocx

Automation, Source, and Sample Handling

Python Automation via PPI

The Phenom XL G3 is standardly accessible through the Phenom Programming Interface for Python-based control of repetitive SEM inspection and analysis tasks. 

CeB Long-Life Source

High-brightness CeB source supports detailed imaging, long service life, scheduled maintenance, intelligent hibernation, and on-site replacement when required. 

Eucentric Sample Holder Option

The optional eucentric sample holder allows safer and easier tilt and rotation access for viewing the sample from multiple directions in demanding SEM applications. 

Surface-Sensitive SED Option

An optional Everhart Thornley secondary electron detector extends the system for surface-sensitive imaging where morphology and topography are critical. 

System Specifications

  • Imaging Module316 (w) × 587 (d) × 625 (h) mm, 75 kg
  • Diaphragm Vacuum Pump145 (w) × 220 (d) × 213 (h) mm, 4.5 kg
  • Power Supply156 (w) × 300 (d) × 74 (h) mm, 3 kg
  • Monitor24-inch, 531.5 (w) × 250 (d) × 515.4 (h) mm, 6.7 kg
  • WorkstationSSD storage, four USB slots, 92.5 (w) × 305.6 (d) × 343.5 (h) mm, 8 kg
  • Sample Loading TimeLight optical <5 s, electron optical <60 s
  • Ambient Conditions15°C to 30°C, 20% to 80% RH
  • Recommended Table Size150 × 75 cm, load rating 150 kg

Optional Mapping & Holder Specifications

Elemental Mapping & Line Scan

  • Element MappingIndividual user-specified maps, plus backscatter image and mix image
  • Selected AreaAny size, rectangular
  • Mapping Resolution32 × 20 to 960 × 600 pixels
  • Pixel Dwell Time1 to 500 ms
  • Line Scan Resolution16 to 512 pixels
  • Line Scan Dwell Time10 to 500 ms
  • ReportDocx format

Eucentric Sample Holder

  • Automated MovementsZ (height), R (rotation), T (tilt), and x′ (x-prime)
  • Maximum Sample Size at 90° TiltØ ≤30 mm; height ≤32 mm
  • Maximum Sample Size below 45° TiltØ ≤70 mm; height ≤32 mm
  • Tilt Angle-15° to +90°
  • Rotation360° continuous
  • SED Detector TypeEverhart Thornley

Application Focus

Automated Quality Control

Designed for high-throughput, repeatable inspection environments where fast loading, reproducible data, and reduced operator burden are essential. 

Large-Sample Industrial Inspection

Supports larger parts and broader scan areas for inspection workflows that go beyond the limits of smaller desktop SEM platforms.

Particles, Pores, Fibers & Roughness

Well matched to automated workflows involving particles, pores, fibers, and 3D roughness-related applications through ProSuite and Python scripting. 

Elemental and Surface Analysis

Optional EDS supports element identification and mapping, while optional SED supports more surface-sensitive SEM imaging for advanced inspection tasks. 

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